Scaling Effects of Micro Bubble Actuators

Peigang DENG, Yi-Kuen LEE and Ping CHENG

Although micro thermal bubble actuation has been applied in many MEMS/BioMEMS devices, little research work has been addressed the scaling of micro bubble actuators. In this work, the fundamental investigation of the scaling effects of micro bubble actuators is reported. Using a 1.66 ms-wide heating pulse, micro boiling in water was studied on various micro bubbel actuators, of which feature sizes range from 0.5 mm to 70 mm. We found that there existed a critical heater size (10mm), for which the boiling pattern with size below or above 10 mm were quite different.

ACKNOWLEDGEMENTS

This work was supported by the Hong Kong Research Grant Council (HKUST6134/04E) and a HKUST PDF grant.

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